Photolithographic Fabrication of a Micro-electrode Surface on a Carbon Steel Sheet for Local Hydrogen Permeation Measurements

Microelectrodes for hydrogen permeation measurements were fabricated by photolithography. Although the application of a positive-type photoresist coating was effective formation circle-shaped pattern with diameter several tens micrometers on an iron surface, had poor adhesion to surface and durability in H2SO4 solution. However, addition silica derived from tetraethoxysilane (TEOS) as inner layer resulted improvement well resistance coating. Furthermore, introduction mixture TEOS glycidyl 3-trimethoxysilylpropyl ether (GPTMS) between long showing large impedance more than 109 Ω cm2 4×105 s Cathodic polarization microelectrode revealed that evolution reaction (HER) rate is dependent plane orientation surface. HER SCM435 steel also strongly depended microstructure hardness local